Features
| - Precision Polishing Jig for accurate wafer/substrate polishing and back-thinning
- Thickness control screw fixture with a resolution of 0.005 mm to limit stock remove
- This Polishing fixture can be fit with Unipol 1202 and 1502 and any precision 12" or larger polishing machine with yoke support to achieve automatic polishing or lapping
- Super-hard tungsten alloy is welded on the bottom of the jig for polishing resistible
- Maximum sample thickness: 13mm
- Maximum travel distance: 14mm
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Sample Holder Vacuum chuck
| - The maximum size of a wafer or substrate is 4" diameter
- If the thickness of the sample is greater than 0.15 mm, adopt vacuum absorption. If the thickness is less than 0.15 mm, please use wax
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| Digital Micrometer | - One digital micrometer is included with a resolution of /- 1 micron for more accurate lapping.
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Pressure Indicator
| - One digital balance is included for measuring the fixture weight ( pressure )
- Weight can be adjusted by screws while measuring on the digital balance from 1g to 2000g.
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Vacuum Absorption and Filter
| - Require a vacuum pump with a rate > 70 L/ min.
- To protect the vacuum pump from any moisture and liquid, connect the filter between the fixture and the pump
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Application notes
| This fixture also can polish < 4" wafer via the blue tape method
- Cut a 4 " diameter blue tape, then stick the 2- 3" wafer or < 4" irregular substrate on the tape
- Then put the 4" blue tape with the wafer to vacuum the chunk
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| Size | O.D: 146mm; Height: 266mm |
| Application Notes | Please click here to download how to use this fixture.
This fixture also can polish < 4" wafer via the blue tape method
- Cut a 4 " diameter blue tape, then stick the 2- 3" wafer or < 4" irregular substrate on the tape
- Then put the 4" blue tape with the wafer to vacuum the chunk
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| Optional Accessories | A vacuum pump is required for vacuum absorption, please order separately.
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